Publication

Adhesion and Homogeneity of a-C:H:Si Films Deposited in a Modified Plasma Nitriding System for Industrial Application

Publication, 2009

Outline

C. Forsich, D. Heim, T. Müller - Adhesion and Homogeneity of a-C:H:Si Films Deposited in a Modified Plasma Nitriding System for Industrial Application - 6th International Conference on Metallurgical Coatings and Thin Films 2009, San Diego, United States of America, 2009