Publikation

Influence and effects of gas flow on the deposition of SiOCN films in an industrial scale DC glow discharge plasma system

Publikation

Outline

T. Müller, A. Gebeshuber, D. Heim, C. Forsich - Influence and effects of gas flow on the deposition of SiOCN films in an industrial scale DC glow discharge plasma system - Asian-European International Conference on Plasma Surface Engineering 2008, München, Deutschland, 2008, pp. 1