Publikation

Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System

Publikation

Outline

C. Forsich, D. Heim - Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System - 34th International Conference on Metallurgical Coatings and Thin Films 2007, San Diego, Vereinigte Staaten von Amerika, 2007, pp. 1