Influence of the deposition temperature on mechanical and tribological properties of a-C:H:Si coatings on nitrided and postoxidized steel deposited by DC-PACVD

Outline

C. Forsich, D. Heim, T. Müller - Influence of the deposition temperature on mechanical and tribological properties of a-C:H:Si coatings on nitrided and postoxidized steel deposited by DC-PACVD - SURFACE & COATINGS TECHNOLOGY, Vol. 203, No. 203, 2008, pp. 521-525