Projekt

BF-Plasmatechnik zur Abscheidu

Projekt

Okt. 2005 - Jan. 2008
2006
C. Forsich, D. Heim, T. Müller - Silica coatings on steel substrates deposited by bipolar pulsed DC PACVD - Tenth International Conference on Plasma Surface Engineering , Braunschweig, Deutschland, 2006,… mehr
2007
C. Forsich, D. Heim - Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System - 34th International Conference on Metallurgical Coatings and Thin Films 2007, San Diego, Vereinigte Staaten… mehr
2008
T. Müller, A. Gebeshuber, D. Heim, C. Forsich - Influence and effects of gas flow on the deposition of SiOCN films in an industrial scale DC glow discharge plasma system - Asian-European International… mehr