Publikation

Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD

Outline:

C. Forsich, D. Heim, T. Müller, A. Gebeshuber - Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD - 54th Annual Technical Conference Proceedings54th Annual Society of Vacuum Coaters Technical Conference, Chicago, United States of America, 2011