Publikation

Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD

Outline:

C. Forsich, D. Heim, T. Müller, A. Gebeshuber - Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD - 54th Annual Technical Conference ProceedingsConference, Chicago, Vereinigte Staaten von Amerika, 2011