Publikation

Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System

Outline:

C. Forsich, D. Heim, T. Müller, A. Gebeshuber - Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System - 37th International Conference on Metallurgical Coatings and Thin Films, San Diego, Vereinigte Staaten von Amerika, 2010