Publikation

Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System

Outline:

D. Heim, C. Forsich, T. Müller, A. Gebeshuber - Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System - 14th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Deutschland, 2014